Vacuum Chamber Probe station
 1
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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 2
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 3
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 4
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 5
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 6
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
|
 7
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
|
 8
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
|
 9
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
|
 10
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
|
 11
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 12
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 13
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 14
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 15
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
|
 16
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
|
 17
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
|
 18
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
|
 19
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
|
 20
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
|
 21
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
System Control Rack
|
 22
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
System Control Rack
|
 23
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
|
 24
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
|
 25
M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
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