Vacuum Chamber Probe station
1 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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2 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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3 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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4 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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5 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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6 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
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7 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
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8 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
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9 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
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10 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
MFC & Controller
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11 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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12 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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13 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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14 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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15 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / PH_VC155 / Probe Tip
Vacuum pump & Gauge System
System Control Rack / AVR
Vibration Table_Rack Type
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16 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
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17 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
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18 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
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19 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
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20 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
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21 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
System Control Rack
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22 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
System Control Rack
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23 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
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24 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
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25 M4VC
Probe station main body
Microscope / Monitor / CCD Camera
Positioner_PBC200 / Probe Tip_Ceramic
Vacuum pump & Gauge System
Dawn Table_Rack Type
Angle Valve Unit
Cooling Port & LN2 Tube
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