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 Model : TEL 19S
Size : For 6inch(3 to 6 inch Available)
Chuck : Gold/Nickel Chuck
Automatic Alignment Mechanism
Auto loader/unload
Auto index , Auto flat zone
Auto handling arm
Microscope/eyepiece
Joystic controller
Interface GP-IB/RS232/TTL |
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Option
Hot Chuck(130c)
Probe Card Holder
Positioner Ass,y
Inker Ass'y
Interface GP-IB/RS232/TTL
LD, LED, OPTIC / TR Application
Many w/f probing, high speed
Test time - 125mm/sec |
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Wafer Size : 5”, 6”, 8”
X/Y axes -Probing Area : ±120mm
Maximum Speed :200mm/s
Z axis -Full Stroke : 37mm
Maximum Speed :35ms/0.5mm Stroke
θ axis Rotation Range ±5 deg
Fine Alignment : CCD ITV lmage Processing
Loader - Cassette Mounts : 1(2nd cassette with option)
Wafer Handling : Robot Arm/Backside Holding
Hard Disk : 3.5” 4GB (1 unit standard)
Floppy Disk : 3.5” 2HD/2DD(1 unit standard)
Display : 10.4” TFT Color LCD
Power Consumption : Approximately 1.5 Kva
Air Supply -Source Pressure : 0.4 Mpa or more
Consumption : Approximately 0.1 liters/wafer
Vacuum Supply :Less than 50 kpa, 30 liters/minute
Dimensions : 1093(w) x 1173(d) x 933(h) mm
Weight : 900kg(Standard)
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Model : UF200
Wafer Size : 5”, 6”, 8”
X/Y axes -Probing Area : ±120mm
Maximum Speed :200mm/s
Z axis -Full Stroke : 37mm
Maximum Speed :35ms/0.5mm Stroke
θ axis Rotation Range ±5 deg
Fine Alignment : CCD ITV lmage Processing
Loader - Cassette Mounts : 1(2nd cassette with option)
Wafer Handling : Robot Arm/Backside Holding
Hard Disk : 3.5” 4GB (1 unit standard)
Floppy Disk : 3.5” 2HD/2DD(1 unit standard)
Display : 10.4” TFT Color LCD
Power Consumption : Approximately 1.5 Kva
Air Supply -Source Pressure : 0.4 Mpa or more
Consumption : Approximately 0.1 liters/wafer
Vacuum Supply :Less than 50 kpa, 30 liters/minute
Dimensions : 1093(w) x 1173(d) x 933(h) mm
Weight : 900kg(Standard)
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Model : EG2001X (High Table)
Size : 3 to 6 inch Available
Chuck : Gold Chuck (vacuum type)
X/Y/Z auto control
X/Y stage speed 2.45mm/sec
Automatic Alignment Mechanism
Auto Loader
Auto Index
Microscope/eyepiece
Interface GPIB/RS232/TTL
Edge Correction
Option
Hot Chuck
Probe Card Holder
Inker Ass'y
Positioner Ass'y
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Model : EG 4080
Size : 4”, 5”, 6”, 8”
Accuracy : 10um
Xy positioning -travel(x,y) : 530mm,239mm
speed : 254mm/sec
Resolution : 0.5um
Repeatability : 0.5um
Motor : stepping
이송방식 : 리니어 air 베어링
Z-stage : resolution 6.4um
robing range : 5.8mm
Demension(w*d*h) : 1150*894*342mm
Weight : 462kg
Power : 100,115,230V
Utility - air : 5kgf/cm
Vacuum : 400mmHg
Chip size : 350~75000um
Wafer thickness : 150~1000um
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Model : EG 4090u
Size : 4”, 5”, 6”, 8”
Accuracy : 10um
Xy positioning -travel(x,y) : 530mm,239mm
speed : 254mm/sec
Resolution : 0.5um
Repeatability : 0.5um
Motor : stepping
이송방식 : 리니어 air 베어링
Z-stage : resolution 6.4um
robing range : 5.8mm
Demension(w*d*h) : 1150*894*342mm
Weight : 462kg
Power : 100,115,230V
Utility - air : 5kgf/cm
Vacuum : 400mmHg
Chip size : 350~75000um
Wafer thickness : 150~1000um
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